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LMM™ – Linear Moving Magnet Cathode

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The Linear Moving Magnet sputter cathode – LMM™ cathode, is a  patented full face erosion rectangular design and it is available for all KDF systems. We continue to innovate this field proven LMM™ cathode design so that our clients now have the full capability to run RF depositions and full dielectrics can be deposited.

The LMM™ cathode offers high material utilization with minimized re-deposition resulting in reduced particulates. The LMM™ cathode enhanced design advances the capability to work in DC pulse reactive sputter mode with all materials. A Magterial™ version of the LMM™ cathode is available providing the ultimate in utilization and lifetime when sputtering magnetic materials such as Nickel.
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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
Company Contacts
Kurt Flechsig
President & CEO
Tel: +1 (201) 784-5005
E-mail: kurt@kdf.com

Solutions in Action

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Today’s consumers are accustomed to a certain level of imperfection in electronic devices.

An LED flashlight may fail. A laptop may no longer boot up the way it did just yesterday. But while these everyday equipment deficiencies may be accepted as part of modern living, the stakes are much higher when it comes to medical devices.

“Our customers in the implantable medical device industry demand the highest level of quality and precision,” said Todd Plaisted, director of marketing, KDF. “Equipment failure to perform is simply not an option for companies that produce pacemakers and defibrillators.”

844i Series systems
Like all KDF sputtering tools, 844i Series systems are designed to meet demanding processing
requirements and feature an intuitive interface to monitor parameters.

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Founded in 1986, KDF is a leading supplier of physical vapor deposition (PVD) batch inline sputtering tools. These vacuum coating systems are used in the production of mainstream silicon, emerging materials, fl at panel displays, optical communications and medical devices. From headquarters in Rockleigh, New Jersey, KDF serves a global customer base and supports more than 3,300 systems in the field.

“More than half of the semiconductor fabs in the world use a KDF system in wafer processing,” Plaisted said. “And we extend the same quality the medical device market demands to all industries we serve.”

Virtually always located in a cleanroom environment, sputtering tools precisely deposit thin films of various materials, metals and/or dielectrics onto a substrate.

Next, the wafers typically enter etching or patterning equipment. Depending on the application, the substrate can return to the sputtering system several times during the manufacturing process to add different layers.

“Recipe management is critical throughout this process,” said Marc Fregeau, software development manager, KDF. “We develop all the programming for our customers – and update the software for them as their processes change.”

As more companies embrace contract fabrication, recipe control and monitoring has become increasingly important. In this emerging business model, a manufacturer provides fabrication services for a wide range of customers – each requiring different processes.

In 2010, KDF adopted a Rockwell Automation® control and information platform for their equipment featuring an Allen-Bradley® CompactLogix™ controller and an RSView®32 HMI solution.

“The initial control solution met our requirements,” Fregeau explained. “But as our customers’ process requirements became more demanding, we needed a more robust visualization solution that could grow with us.”

To enhance system performance, the company recently migrated to a FactoryTalk® View Site Edition (SE) HMI platform. In addition, the company opted for a CompactLogix 5370 controller (L36ERM), which features faster processor speeds and supports up to 16 axes of integrated motion over an EtherNet/IP™ network.

“Moving from the 32-bit HMI to the 64-bit FactoryTalk View solution was key,” Fregeau explained. “It provides a framework for an easy-to-use recipe management system – and the capacity to meet the demand for real-time information in a complex process environment.”

KDF systems are designed to monitor all process parameters including power supply voltages, sputter gas pressures/ratios, residual gas analyzer (RGA) background species vacuum integrity checks, substrate temperatures and more. The FactoryTalk View application helps enable real-time operator monitoring of those parameters through intuitive displays – and provides an audit trail of operator and alarm information in a centralized log database for absolute process validation.

“If there’s a process anomaly, the data logging helps determine the root cause,” Fregeau said. “The system also allows us to actively take ‘snapshots’ of the process in real time for reporting purposes.”

As an option, KDF customers can add FactoryTalk Historian to their system. FactoryTalk Historian features built-in connectivity to FactoryTalk View and provides robust, high-speed data collection and analysis capabilities.

For efficient system development, KDF applies the same Rockwell Automation control and visualization platform across its complete machine portfolio.

“Our sputtering tools share many components – as well as the control system,” Plaisted said. “A shared platform allows us to develop versatile equipment very cost-effectively.”

Looking toward the future, KDF is positioned to respond to fluctuating customer requirements – and an unpredictable marketplace.

“We are constantly changing,” Plaisted said. “And the Rockwell Automation control environment allows us to configure our tools and make changes as we need them.”

View the original article

Obsolete Operating Systems

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You have been identified in our equipment database as being a KDF “T”, “GT”, “NT” or early “i” sputter system owner who is still using either the obsolete Brooks Techware controller and/or the obsolete MKS 146 gauge package.

Most recently Microsoft has announced as well that its support of the Windows XP operating system has ceased, leaving owners of such vulnerable to both malicious and damaging interruptions. The KDF equipment still using these items can now be 30yrs.old. In regards to the Techware controllers Brooks support both from themselves and through their designated second and third parties ended almost 15 yrs. ago. Replacement hardware availability is now non-existent.

MKS had also announced many years back the end of the popular 146 vacuum gauge controller, due to component obsolescence. MKS support for the gauges which was limited to stock of these obsolete components ended this year. (The 146 was used extensively on GT and NT systems) To that extent KDF has developed and produced a 146-gauge replacement package that is available to customers who are already running on the KDF “i” controller platform or to customers needing the full upgrade. The package includes the MKS series of “Smart” gauging coupled with a VAT throttling gate valve. T and GT system owners already face additional obsolescence with the SX and MKS 287 & 290 controllers as well as NT users who are now also experiencing PC hardware obsolescence. Once upgraded to the “i” series the system can be further enhanced with options and upgrades to improve reliability and performance. Some of the available upgrades include a CPU, Windows 7 replacement kit, a load lock linear positional transducer, zeta scan velocity profiling controller, enhanced power supplies and new load lock heat pallet temperature measurement and control feature utilizing an optical sensor.

Customers that have already upgraded to the KDF “i” controller have insured themselves against further component obsolescence and unplanned down time. All upgraded systems operate on the same platform as the new KDF “i” systems (Windows 7) thus insuring years of compatibility and ongoing enhancements. All upgraded systems now have on line system available remote help from KDF.

For GT and NT system owners the system can be upgraded in the field typically within a week thus minimizing system down time and bringing your upgraded system back on line quickly. “T” systems typically take longer based upon the system’s configuration and are returned to the factory for full blown upgrading and reconditioning. In the past 10 yrs. KDF has successfully upgraded numerous systems both in the U.S., Europe, and the Pacific Rim. All upgrades include KDF’s ESP online Internet support Webex) See individual cut sheets for system type upgrade pricing.

Prudently planning a conversion now to the updated platform will minimize a lengthy unplanned tool down situation. (12-16 weeks)

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As always please don’t hesitate to contact KDF for a quote or for any other of your service or system needs.

Jac P Gnirrep
Director of Customer Satisfaction
jac@kdf.com

End of Life

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KDF acquired the MRC batch product line in 1986 and to that extent we have been supporting and maintaining those customers whose chose to continue with this product line for the last thirty plus years.

The support consisted not only of service, repairs and part sales but also selling factory reconditioned MRC tools which KDF supported and kept under warranty. KDF also maintained a vast inventory of spare parts to support this generation of equipment as well as a working service support system on the factory floor.

For those customers that were MRC users over the years many have migrated to the KDF line which allowed for a seamless transition of enhanced compatibility and familiarity both in vertical and horizontal sputtering. For those customers who have migrated to the family of KDF sputtering systems KDF ‘s roadmap and policy of “no tool left behind” has allowed for them to upgrade their systems over the years as the technologies and components utilized in the tools has evolved or gone obsolete.

For MRC users the end of life for these tools has approached the event horizon.

One of the benefits of crossing over is that it allows for the customer to take advantage of KDF’s complete applications lab that can assist you with transferring process requirements from MRC to KDF and can be done prior to delivery of your new equipment thus insuring minimum start up time.

By migrating to the KDF line of tools many consumable parts that you may have significant inventories of may be able to be utilized on the equipment such as cathodes, targets and shied sets. This alone offers a cost advantage over another competitor’s tool.

Trade in credit is also available for certain MRC systems. Contact Todd in Sales for more information. Todd@kdf.com 201-784- 5005.

Prudently planning a conversion or trading in your old tool now to the KDF equipment line will minimize a lengthy unplanned tool down situation.

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As always please don’t hesitate to contact KDF for a quote or for any other of your service or system needs.

Jac P Gnirrep
Director of Customer Satisfaction
jac@kdf.com

KDF News Article as seen in the April 2013 issue of Vacuum & Coating Technology magazine

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Pirates Abound: The Problem with IP for OEM’s

BY KURT FLECHSIG, KDF[spacer height=”20px”]

There is a growing concern within the competitive semiconductor industry about re-builders and third party companies that make a business from copying the IP of others and then try and spin it into the term of Reverse Engineering. The last time I checked that term is just a PC way of saying you’re not STEALING. Activity of this nature can best be referred to as Pirating since it best describes their activity. As an OEM we develop our core competencies to bring a higher level of value, knowledge
and capabilities to our customers rather than the pirate companies whose premise is to pretend to bring value added to a product they have no rights to.

In todays’ cutthroat, price is all that matters society, the assault against OEM’s is relentless, specifically sputtering cathodes, gas cooling and proprietary software development. Customers seem to lose sight of the benefits when dealing with the OEMs that actually spend the money and create the knowledge base while developing these new concepts and products that other people try to leverage off of. When the foundations of OEM’s are chipped away by the unsavory practices by these Pirate run companies, it will eventually hurt the customer in the long run. Some third party rebuilders will argue that original OEM’s that have gone out of business are fair game for them to offer their alleged parts and services to keep such equipment running.

I would say that why would one want to deal with a company that does not have direct ownership of a product, or the insight behind the design of said product. The company you deal with should have the original parts, knowledge, and documentation to support such, otherwise you’re dealing with a lookalike replica product which will not perform or last as the original design intended.

As an example of such things I will illustrate some of the issues that face new equipment people.

Many pirates install a low-cost PLC retrofit controller with minimal software coding and features to replace the original systems controller. More often than not these controllers are used components or outdated models which allows having a greater profit on the goods sold while providing an inferior product to the customer. Our company provides the newest PLC systems which use a higher end controller than what the pirates offer. To ensure consistency of product, valued service and continued technical support, companies should rely on the original manufacturer’s software knowledge and not an outside source.

Customers afflicted by these pirates have suffered a multitude of problems due to false claims and poorly developed software. These include, but are not limited to out of date versions of software, copies of nonlicensed software, providing shareware as an operating system, and not owning a legal copy of development software licenses.

These kinds of poorly developed software are not created with static analysis practices or software testing customs in mind. In the fast-paced digital age, the importance of static code analysis cannot be ignored.

Our core competency is to make Brand new equipment which includes large investments in Engineering and Process Development for the systems we design, prototype and build. As an OEM we make investments into the R&D aspect of our products lines and we spend a great deal of resources to do so. KDF had designed upgrades into even our oldest product lines which go back 25 years, as an OEM we also continue to offer upgrades for our Legacy systems. KDF provides re-manufactured MRC/KDF tools as a cost savings to the customers with smaller budgets ,while still maintaining a high level of quality.

Furthermore, there is a big price point difference between remanufacturing and just performing a software upgrade. Re-manufacturing has the benefits of buying a new tool but at a reduced price. A customer most always keep in mind that certain obsolete components need to be replaced during the re-manufacture in order to ensure the tool is current and supportable for spare parts
in the continuing future of the tool.

The Pirate will frequently copy KDF’s Cathode or Magnet IP and then tried to pass it off as improved. They tout better system utilization but the truth is customers lose out on uniformity or overall performance. Cathodes are designed for a long manufacturing life, yet pirate replacements often do not stand up to longterm use and cost customers more money over time. As an OEM we have produced thousands of new cathodes, and we track and record the data to back up the performance of our Cathodes. In order to have a successful purchase customers expect and need a company that can supply process support. We have made this investment in thin film expertise and have the metrology instruments and personnel to supply such. A KDF system will leave our production floor with a qualified process running in that tool and arrive at the customer’s site ready for production.

In some situations, our staff will visit a customer’s site to provide service and support after one of these re-building companies has intervened. The typical dysfunctional equipment is now riddled with systemic problems along with processes that do not work. While we have a policy of not working on third party sys-Pirates Abound: The problem with IP for OEM’s By Kurt Flechsig, KDF tems, we can sometimes help by supplying parts and offering alternate means of repair. The majority of these customers usually end up paying more for the product and suffering with longer downtimes. We have seen many of these re-building companies come and go along with customers’ trust and budgets.

The best way to avoid these problems is to steer clear of these pirates in the first place. Don’t be lured in by low prices and software screen money shots. Before making a purchasing decision, refer to these tips to ferret out pirates:

  • Documentation: Will the company provide software documentation that reflects their actual product? Software documentation should always be provided and not be left up to the imagination of the user.
  • Will the company provide the source code? This is a red flag and, generally, should not be done. The vendor should retain ownership in order to provide the full service required over the life time of the tool.
  • Can the vendor provide a safe code? A system may be able to run on 10k lines of code when it has no recovery actions or well written safety protocols.
  • Who develops and updates the software, employees, third party or students? The level of experience of the developer is crucial for installation and ongoing service of the tool. Many times the code is created by an additional third party.
  • Does your supplier own any of the rights to the equipment they are supplying?
  • Can the vendor supply accurate prints and documentation about the components in the tool that do belong to them?
  • Can the vendor supply full technical support for the tool and the process running in it?
  • Can the supplier provide authentic references of actually customers with working equipment?
  • Are you buying a reversed engineered tool and a one of kind system?
  • Does the vendor supply new components, or rebuilt third party parts, aka pumps, power supplies, feed-throughs, or instruments?
  • Does the vendor you have off site back up and file protections for all of their product aspects?
  • Full remote backup via the internet, with in-house software engineers.
  • Does the vendor have a full in-house Application Lab staffed with process literate scientists?
  • Is the system safe? Does it meet any SEMI, S2, CE, NEC or NFPA standards?

As an OEM our company stands behind MRC and our own KDF systems. We are the sole official owner of MRC sputtering tools. Furthermore, we have programs in place in which we improve upon our current designs as well as ensure consistency and performance. We also are working with customers to develop new processes and hardware. Our in-house experienced software , mechanical and electrical engineers continually strive to develop products with the most up-to-date improvements and revision control. This is the key that will open the door to customers’ advanced process needs for their sputtering systems, and help them to meet their goals.

View the original article

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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
Company Contacts
Kurt Flechsig
President & CEO
Tel: +1 (201) 784-5005
E-mail: kurt@kdf.com

We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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