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KDF Technologies | Precision In-Line PVD Sputtering Systems
KDF 974i In-Line Sputtering System
±1%
Film
Uniformity
35+
Years of
Expertise
600+
Person-Years
Engineering
100%
Factory
Qualified
KDF Technologies — A Kurt J. Lesker Company

Precision
Thin Film
Begins Here

World-class in-line PVD sputtering systems engineered for the most demanding substrates — medical implants, photonics, hermetic sealing, compound semiconductors, and beyond.

Request a Quote Explore Systems

Trusted by
NASA IBM Intel HP Lockheed Martin Northrop Grumman
Industries We Serve

If Your Process Requires Precise Thin Films, We're Built for It

KDF systems are deployed across the world's most demanding thin-film applications, where process reliability is non-negotiable.

Medical Devices

Biocompatible metallization of implantable devices, stents, surgical instruments, and diagnostic substrates with zero contamination tolerance.

Ti / TiNAu / PtDLC
Explore Application

Hermetic Sealing

Feedthroughs, implantable housings, and ceramic-to-metal seals for aerospace, defense, and cardiac devices demanding absolute hermeticity.

Ti / W / AuCeramicAlN
Explore Application

Photonics & Quantum

Laser diode facet coatings, optical isolators, and quantum device metallization where Angstrom-level thickness control defines device performance.

SiO2 / Si3N4ITOAl2O3
Explore Application

Integrated Passive Devices

Ultra-precise resistor and capacitor thin films for IPDs, RF filters, and thin-film circuits with exceptional lot-to-lot repeatability.

NiCr / TaNSiNCu / Al
Explore Application

Sensors & Monitoring

MEMS sensors, pressure transducers, and electrochemical devices with demanding thin-film requirements for industrial and medical monitoring.

Pt / PdZnOMo / W
Explore Application

Wear Coatings

Hard coatings for cutting tools, molds, and precision components. TiN, CrN, and DLC deposited in-line for production-scale hardness and adhesion.

TiN / CrNDLCAlTiN
Explore Application
Why KDF

Process Depth
That Actually
Matters

We don't just sell equipment — we deliver process capability built over 35 years engineering solutions for NASA, Lockheed Martin, and the world's most demanding fabs.

+/-1%
Uniformity via ERPP
600+
Person-Years of engineering
35+
Years of process heritage
100%
Factory process-qualified
Full Capability Story
01

ERPP Uniformity

Proprietary rotating planetary platen — sub-1% uniformity across substrate

Proprietary
02

Substrate-Safe Processing

Low-temperature in-line for implants, polymers, and III-V wafers

In-Line Only
03

Precious Metal Deposition

Upsilon Inset maximizes ROI on Au, Pt, Pd, and Ru targets

Upsilon Inset
04

HIPIMS

Ultra-dense, pinhole-free coatings via high-power impulse magnetron sputtering

Advanced
05

Reactive PEM Control

Plasma Emission Monitoring for stable stoichiometry in oxide and nitride films

Reactive
06

Run-to-Run Stability

Automatic Rate Adjust closes the loop on deposition rate every run

ARA
07

In-House Process Dev

KDF engineers develop your process before delivery — not after

Included
KDF Sputtering Systems

The In-Line Platform Built for Production Reality

Every KDF system is engineered from the ground up for continuous high-throughput production — not adapted lab equipment.

Flagship KDF 974i Series
KDF Flagship System

974i Series

KDF's most advanced in-line sputtering platform. Built for the highest-value substrates — ceramic implants, AlN, compound semiconductors — where uniformity and process cleanliness are non-negotiable.

+/-1% UniformityHIPIMS Ready8-Cathode ConfigPEM Control
View 974i Details
KDF 900i Series
Production Series

900i Series

High-throughput in-line platform proven across medical, IPD, and semiconductor production environments.

High ThroughputMulti-Cathode
View Details
KDF 844i System
Mid-Range Production

844i System

Balanced capacity and footprint for mid-volume production with flexible cathode configurations.

Flexible ConfigERPP Ready
View Details
KDF 744i System
R&D to Production

744i System

The bridge from development to production. Qualifies your process today and scales with your volume tomorrow.

R&D CapableScale-Up Path
View Details
KDF 600i Series
Entry Production

600i Series

Full KDF process heritage in a compact, cost-effective platform for smaller substrates and moderate throughput.

CompactProduction Ready
View Details
View All Sputtering Products
Process Capability

One Platform. Every Process You Need.

Deposition Modes

How We Deposit

  • DC Magnetron Sputtering
  • RF Sputtering
  • HIPIMS
  • Reactive Sputtering
  • Co-Sputtering
  • Pulsed DC
Materials

What We Deposit

  • Metals: Ti, W, Mo, Ta, Al, Cu
  • Precious: Au, Pt, Pd, Ru, Ag
  • Nitrides: TiN, CrN, AlTiN, Si3N4
  • Oxides: SiO2, Al2O3, ITO, ZnO
  • Alloys: NiCr, TaN, NiFe
  • DLC Coatings
Substrate Geometries

What We Coat

  • Wafers (Si, SiC, GaN, GaAs)
  • Ceramics (AlN, Al2O3)
  • 3D Parts & Implants
  • Flexible Substrates
  • Small-Die & Singulated
  • Carrier-Mounted Assemblies
Process Controls

How We Control It

  • ERPP Uniformity Platen
  • PEM Reactive Control
  • ARA Rate Stabilization
  • In-Situ Film Monitoring
  • Real-Time Power Control
  • Full Recipe Management
Customer Testimonials

What Our Clients Are Saying

"
★★★★★

We bought our first KDF 12 years ago... 12 years later we are buying our fourth KDF system. We have multiple sputter systems from 6 different manufacturers. KDF is the best vendor we have dealt with. They set the bar for customer service and quality.

MJ
M. Jones
Production Engineering — 4x KDF Customer
"
★★★★★

I worked with KDF for 15 years. The machines are built with high quality components. KDF customer service is outstanding and they stand behind their product. If I ever had a question, they respond rapidly.

HH
Haytham Hussein
Process Engineer — 15-Year Partner
"
★★★★★

We are working with KDF for a few years and the support is great. The technician in Europe answers mail very fast and his knowledge is very extensive. The support for spare parts is very good too.

AE
Aitor Arregi Elorza
Maintenance Technician — European Facility
Technical Resources

Insights From 35 Years of Thin-Film Engineering

ERPP Technology
July 12, 2025

How KDF's ERPP Technology Achieves +/-1% Uniformity

A deep technical look at the rotating planetary platen system delivering industry-leading thickness uniformity.

Read Article
Built for Production
July 1, 2025

Built for Production. Trusted for Repeatability.

What separates KDF — and why production engineers keep coming back.

Read Article
MRC Heritage
August 7, 2025

MRC Heritage and Evolution

Honoring a legacy of innovation and sustaining a standard of excellence across decades of thin-film history.

Read Article
View All News & Articles

Ready to Talk About Your Process?

Our application engineers are standing by to discuss your substrate, your film stack, and the right KDF system for your production needs.

Request a Quote Learn About PVD
(201) 784-5005 sales@kdf.com
10 VOLVO DRIVE · ROCKLEIGH, NJ 07647
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We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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Customer Service & Support

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Contact Us

(201) 784-5005
(201) 784-0202
sales@kdf.com
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