Original OEM
Sputtering Parts
Original Materials Research Corporation (MRC) and KDF Technologies OEM parts — manufactured to exact specifications, backed by the deepest bench of inline sputtering knowledge in the industry.
Three Categories. Everything Your System Needs.
KDF stocks and manufactures original OEM parts across three major categories for MRC and KDF inline sputtering systems — ensuring your tools stay running at specification regardless of age or model.
Consumables
High-frequency replacement items engineered to original MRC and KDF specifications — critical for maintaining process stability and system cleanliness between maintenance cycles.
- Shields
- O-rings
- Bearings
- Heat lamps
- Magnets (all cathode types)
- Pallets — custom or standard
- Ion tubes
- Thermocouples (TCs)
Replacement Parts
Structural and process-critical components manufactured to original engineering drawings — including KDF's patented cathode designs, which are the sole intellectual property of KDF Technologies.
- Cathodes — Inset™ (Upsilon, Mu, Chi, Focest)
- Cathodes — Planar, Mark II, Magterial™, X-Series™, Q-Set
- Bellows and garlock seals
- Feedthroughs (ferro-fluidic)
- Pallet carriers and shutter carriages
- RF networks and solenoids
- Cryo pumps and compressors
- Gate valves and grippers
- Hydraulic pumps, manifolds, valves & cylinders
- Air packages and etch platforms
- Stainless steel roughing lines and viewports
Electrical
Electronic and control system components maintained to original specification — including modern upgrades that extend system life while preserving process compatibility with your existing recipes.
- Printed circuit boards
- RF generators
- Flow control valves
- Gas flow controllers
- Power supplies — RF and DC
- Computer boards and I/O cards
- Analog racks
- Pressure gauges
- Windows 10 control computer upgrade (from Windows 7)
Explore Specific Part Lines
The Case for Original KDF & MRC Parts
Aftermarket parts for inline sputtering systems can introduce process variability, vacuum incompatibility, and reliability risks that are difficult to diagnose and costly to remediate. KDF's original OEM parts eliminate that risk entirely.
KDF is the OEM for MRC batch systems — the only source with access to original engineering drawings, design intent, and the institutional knowledge required to manufacture parts that perform to specification. No other supplier can offer this.
KDF's support for legacy MRC systems is backed by engineers with 600+ combined person-years of MRC and KDF equipment experience — the deepest bench of inline sputtering knowledge in the industry.
Process Integrity
Parts engineered to original specifications maintain your validated process parameters and film properties.
Vacuum Compatibility
OEM materials and finishes are selected for vacuum service — eliminating outgassing risks from aftermarket substitutes.
System Longevity
Correctly dimensioned parts reduce wear on adjacent components and extend overall system life.
IP-Protected Cathodes
KDF's patented Inset™ cathode designs are sole KDF intellectual property — only available from KDF.
Original Drawings
As the MRC OEM, KDF retains and actively uses original engineering drawings not available to any other supplier.
Worldwide Support
Parts shipped globally with full documentation — supporting MRC and KDF systems in production worldwide.
Need Parts for Your KDF or MRC System?
Our team can identify the right parts for your system, confirm compatibility, and provide fast turnaround on consumables, replacement components, and electrical parts.
