Repair Services
for KDF, MRC &
VaporTech Equipment
KDF is the original OEM for KDF and MRC batch sputtering systems — with a technical repair staff carrying 35+ years of hands-on MRC experience. We turn around most repairs in 2–3 days, with no expedite fees. Beginning August 1, 2026, KDF also assumes all service, spare parts, and applications support for VaporTech PVD systems.
VaporTech Support Is Moving to KDF
Effective August 1, 2026
All VaporTech PVD system service, spare parts, and applications support transitions to KDF Technologies — a purpose-built organization focused on PVD and advanced deposition equipment, backed by the engineering depth and global infrastructure of the Kurt J. Lesker Company. Until then, continue contacting VaporTech directly at servicesupport@vaportech.com for all service, parts, and applications needs.
KDF's service team is fully trained on VaporTech platforms and OEM-designed spare parts are stocked and ready. Existing maintenance contracts and service agreements will be honored through the transition.
Full transition details, timeline, and FAQ are available on our dedicated VaporTech Support page.
Fast. Expert. No Hidden Fees.
KDF's technical repair staff carries more than 35 years of direct MRC and KDF equipment experience. Unlike most OEMs whose repair shop turnaround times can take weeks to months, KDF typically returns your repaired parts in 2–3 business days.
KDF also doesn't charge expedite fees — a practice that has become standard at most OEMs today. Your repair is already our top priority. To deliver on that commitment, KDF maintains fully operational MRC model computers and an operational testbed system, ensuring complete and accurate testing of every repaired assembly before it leaves the facility.
For systems experiencing downtime while a unit is being repaired, KDF offers creative solutions to minimize the impact on your production. Contact us to discuss your specific situation and the options available to you.
Four Reasons to Choose KDF
2–3 Day Turnaround
Most mechanical and electrical assemblies returned within 2–3 business days — not the weeks or months typical of other OEM repair shops.
No Expedite Fees
KDF doesn't charge expedite fees — unlike virtually every other OEM where this has become standard practice. Priority service is simply how we operate.
Fully Tested Before Shipment
KDF maintains operational MRC model computers and a live testbed system — ensuring every repaired assembly is fully verified under real operating conditions before return.
Original OEM Knowledge
KDF is the original manufacturer — our repair team carries 35+ years of direct MRC experience and has access to original engineering drawings no other supplier can match.
Own a KDF-1000i™, 1500i™, 3000i™, MAX1500™, or Cadence® PVD/DLC coating system, or a VaporTech VT/V.MAX system? Beginning August 1, 2026, these are supported through KDF's VaporTech transition program.
VaporTech PVD Support →Mechanical & Electrical Assemblies Serviced
Virtually all mechanical and electrical assemblies from the MRC 800 Series through the KDF 600i and 900i are serviced. KDF's repair capability spans the full system — from high-voltage power supplies and RF generators to hydraulics, vacuum hardware, and control electronics.
RF Generators & Power Supplies
RF generators, DC power supplies, RF networks, and bias power supplies. KDF maintains RF tube generators tested and ready for swap — minimizing downtime while your unit is being repaired.
Control Computers & Electronics
MRC model control computers, printed circuit boards, I/O cards, analog racks, and control system electronics. KDF maintains fully operational MRC computers for accurate board-level testing.
Mechanical Assemblies
Hydraulic pumps, manifolds, valves, and cylinders. Pallet carriers, shutter carriages, gate valves, bellows, and feed-throughs. Complete mechanical sub-assembly repair and rebuild.
Vacuum Components
Cryo pumps, compressors, roughing lines, and viewports. Ferro-fluidic feedthroughs and rotary seals. All vacuum components tested on KDF's live testbed system before return.
Cathode Assemblies
Sputtering cathodes of all KDF configurations — Inset™, Planar, Mark II, Magterial™, LMM™, and x Series. Cathode repair, rebuild, and conversion to updated configurations.
Gas & Process Systems
Gas flow controllers, pressure controllers, flow control valves, and process gas delivery components. All calibrated and tested against specification before return.
MRC RF Tube Generator Swap Program
KDF operates an RF tube generator swap program specifically designed to minimize downtime and repair costs on MRC systems. Instead of waiting for your generator to be repaired, KDF ships a tested, ready-to-install replacement unit immediately — so your system is back up while KDF repairs your original.
KDF maintains a stock of RF tube generators that have been fully tested and are ready for immediate shipment. Units are swapped on an exchange basis, keeping your system running with minimal interruption to production.
End of Life Notice for Legacy MRC Electronics
End of Life — Legacy MRC Electronic Components
Over the past decades KDF has been keeping legacy MRC products running. However, many of the electronic components used in these systems are now end-of-life — no longer manufactured and increasingly difficult to source. KDF will continue to make every effort to service and repair legacy MRC systems as outlined above, but KDF can no longer guarantee its ability to do so indefinitely.
Customers operating legacy MRC systems should plan accordingly to replace them. KDF's current inline sputtering platforms — the 600i, 900i, and 974i Series — are direct successors to the MRC product line, backed by the same engineering heritage and KDF's complete parts and service infrastructure.
View Current KDF Systems →Need a Repair on Your KDF, MRC, or VaporTech System?
Contact KDF to initiate a repair order. Our team will confirm scope, turnaround time, and return shipping — most assemblies back in 2–3 days with no expedite fees.
