KDF introduces the 5 Pallet Stacker option for the KDF 900i Series Batch Sputtering Systems. This new option allows for 5 pallets to be loaded into the system Load Lock where they are automatically indexed in and out for processing

KDF introduces the newly enhanced Planetary Pallet design. This enhanced Planetary Pallet design is an internally motor-driven pallet which can hold wafers sizes from 2 to 5 inches in a rotational “sun” and “planetary” motion while the pallet linearly traverses

The KDF 844i Batch Sputtering System has been re-engineered and updated. KDF introduces many new upgrades and enhancements that allow our clients to process heavier payloads of up to 140 pounds. These enhancements also include drive improvements to support the

The Linear Moving Magnet sputter cathode – LMM™ cathode, is a  patented full face erosion rectangular design and it is available for all KDF systems. We continue to innovate this field proven LMM™ cathode design so that our clients now