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Backing plates

MRC Style Backing Plates | KDF Technologies
Original OEM Parts · KDF Technologies

MRC Style
Backing Plates

KDF holds all manufacturing rights to MRC style backing plates — stocked for immediate delivery. Manufactured on NC equipment to original specifications, guaranteeing dimensional tolerances and absolute reproducibility.

Request a Quote → Download PDF
At a Glance
OEM All MRC & KDF Specs
$2M+ Working Stock Inventory
Days Typical Delivery from Stock
OEM Manufacturing

MRC & KDF Backing Plates

KDF holds all manufacturing rights to MRC style backing plates and stocks all MRC backing plates for immediate delivery. Custom manufactured backing plates can be manufactured to meet individual customer requirements and system specifications.

In all cases, backing plates are manufactured on numerically controlled (NC) equipment to the original specifications — guaranteeing required dimensional tolerances and absolute reproducibility across every order.

KDF is constantly making improvements and design changes to enhance and improve the performance of these products. KDF is the original OEM for its i Series, ix Series, NTX, 744, and 844 backing plates.

Compatible Systems

Stocked for All KDF & MRC Platforms

KDF i Series KDF ix Series NTX KDF 744 KDF 844 MRC 903 MRC 943 MRC 8667 Custom

Do not be fooled by third-party pirated parts. KDF manufactures all backing plates from original MRC documentation located and maintained at KDF — the only source with access to these engineering drawings.

Bonding Services

Target Bonding to Backing Plates

Indium Bonding

Indium and indium alloys develop a high-strength bond and ensure the thermal transfer and conduction needed for today's high-powered sputtering systems. The preferred method for thermally demanding applications.

Epoxy Bonding

Epoxy bonding combined with indium and indium alloys allows KDF to bond targets with highly dissimilar coefficients of thermal expansion — enabling a wider range of material pairings than indium alone.

Picture Frame Bonding

Available for SiO₂, Pyrex, and ITO targets. KDF's picture frame bonding technique maintains target flatness and integrity across the full bonded assembly — critical for fragile and brittle target materials.

KDF enjoys a highly regarded reputation for void-free and defect-free bonding. Each backing plate, target, and assembly is individually inspected and properly packaged to ensure all customer requirements are satisfied.

Full Product Line

KDF Supplies Everything Your System Needs

Sputtering Targets

High purity metals, alloys, non-metallic materials, and cermets in planar, circular, rectangular, Upsilon™, conical, ring, delta, and custom geometries. Chi, Mu, Muset, and Upsilon Inset Cathode™ target materials available.

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Evaporation Materials

High purity evaporation materials available as pellets, rods, tablets, slugs, granular, cones, powder, wire, and foil — covering the full range of thermal and e-beam evaporation process requirements.

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Sputtering Cathodes

Inset™ (Upsilon, Mu, Chi, Focest), Magterial™, LMM™, G12™, and x Series cathodes. Conversion kits available to switch between Inset™ cathode configurations. 17" x Series offers enhanced pallet uniformity.

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Bonding Services

Indium, indium alloy, and epoxy bonding of targets to backing plates. Picture frame bonding for SiO₂, Pyrex, and ITO. Void-free and defect-free bonding with full inspection and packaging.

Request Bonding →

Target Stocking Programs

KDF can help develop and implement a target stocking program using JIT techniques — minimizing your inventory investment while maximizing production capabilities and eliminating unplanned downtime from stock-outs.

Discuss a Program →

Parts & Retrofit Kits

Full line of replacement parts for KDF and MRC systems — manufactured from original MRC documentation. Over $2M in working stock inventory delivers most parts within days. Retrofit kits and upgrade kits also available.

All OEM Parts →
Get in Touch

Need Backing Plates for Your KDF or MRC System?

Contact our team with your system model and cathode configuration. Most MRC and KDF backing plates ship from stock within days.

Request a Quote → Download PDF All OEM Parts

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We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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(201) 784-5005
(201) 784-0202
sales@kdf.com
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