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KDF Upgrade Kits

KDF & MRC Upgrade Kits | KDF Technologies
Original OEM Parts · KDF Technologies

KDF & MRC
Upgrade Kits

KDF is committed to delivering quality upgrade kits that extend system life, modernize controls, and improve process performance across both KDF and legacy MRC sputtering platforms — engineered by the original manufacturer.

Request a Quote → All OEM Parts
Two Kit Families Available
KDF Upgrade Kits — for KDF T, GT, NT, and i/ix series systems
MRC Upgrade Kits — for legacy MRC 903 and 943 series platforms
Windows 10 control computer upgrades from Windows 7
Cathode retrofits including new 900 Series cathode upgrades
All kits manufactured to original engineering specifications
KDF Systems

KDF Upgrade Kits

Factory-designed upgrade kits for KDF sputtering systems — extending the service life of your tool while bringing modern control and measurement capabilities to existing platforms.

Control System

Techware Replacement Kit — KDF T Systems

Complete Techware control system replacement kit for KDF T Series sputtering systems — modernizing control architecture while maintaining process recipe compatibility.

Control System

Techware Replacement Kit — KDF GT Systems

Techware control system replacement kit for KDF GT Series systems — updated control hardware and software for improved process reliability and ease of operation.

Control System

Techware Replacement Kit — KDF NT Systems

Techware control system replacement kit for KDF NT Series systems — preserving process compatibility while upgrading the control platform to current standards.

System Upgrade

System Upgrade Kit — KDF i/ix Systems

Comprehensive system upgrade kit for KDF i and ix Series sputtering systems — covering controls, hardware improvements, and process capability enhancements.

Measurement

Load Lock Linear Transducer Kit

Replacement and upgrade kit for the load lock linear transducer — improving positional accuracy and reliability of the pallet transfer system in KDF inline systems.

Instrumentation

MKS 146 Gauge Replacement Kit

Complete replacement kit for the MKS 146 pressure gauge system — maintaining accurate pressure measurement and process control across the full vacuum range.

View Full KDF Upgrade Kit Details →
MRC Legacy Systems

MRC Upgrade Kits

As the OEM for MRC batch sputtering systems, KDF is the only source for original upgrade kits for legacy MRC 903 and 943 platforms — keeping your existing equipment running at full specification with modern components and improved reliability.

KDF acquired MRC's batch product lines in 1998 and has maintained uninterrupted production and support since. Our engineers hold 600+ combined person-years of MRC and KDF equipment experience — no other supplier has this depth of knowledge to design and validate MRC upgrade kits.

Controls

Network Replacement Kit

Complete replacement of the legacy MRC network control system — modernizing communications and control architecture while maintaining full compatibility with existing process recipes and interlocks.

Process Gas

Gas Measurement Upgrade

Upgraded gas measurement and control components for MRC systems — improving flow accuracy, repeatability, and process stability for reactive and non-reactive deposition processes.

Power

DC Power Conversion Upgrade

Modernized DC power supply conversion kit for legacy MRC platforms — replacing aging power electronics with current-generation components for improved reliability and process control.

Hydraulics

Low Pressure Hydraulic Upgrade

Updated hydraulic system components for MRC low-pressure circuits — reducing leak risk, improving response time, and extending the service life of pallet transport and load lock mechanisms.

Vacuum

Rough Line Upgrade

Stainless steel roughing line replacement kit for MRC systems — eliminating aging elastomer lines and improving cleanliness, conductance, and pump-down performance.

Process Control

Pressure Controller Upgrade

Replacement pressure controller kit for MRC systems — providing improved pressure setpoint accuracy and faster response for demanding process requirements.

Scanning

Scan Controller Retrofit

Updated scan controller for MRC inline systems — improving pallet velocity control, scan profile repeatability, and integration with modern recipe management systems.

Cathode

Cathode Retrofits

Factory-designed cathode retrofit kits for MRC systems — including upgrades to KDF's latest cathode architectures for improved uniformity, target utilization, and deposition rate stability.

Cathode Upgrade

New KDF 900 Series Cathode

Upgrade your MRC system with KDF's current 900 Series cathode design — bringing 17" cathode length, improved uniformity, and compatibility with Inset™, Planar™, and LMM™ cathode configurations.

Tooling

Removal & Insertion Tool

Specialized tooling for safe and accurate cathode and component removal and insertion on MRC platforms — reducing maintenance time and eliminating the risk of component damage during service.

View Full MRC Upgrade Kit Details →
Also Available

More OEM Parts & Services

KDF Spare Parts View → Sputtering Cathodes View → Sputtering Targets View → Backing Plates View → PLC Retrofit Kit View → Retrofit Kits View → Repair Services View → MRC Heritage & Evolution Read →
Get in Touch

Need an Upgrade Kit for Your System?

Our team can identify the right upgrade kit for your KDF or MRC system, confirm compatibility, and provide a fast quote. Contact us with your system model and serial number to get started.

Request a Quote → All OEM Parts

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We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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