KDF Spare Parts
KDF IN-LINE SPARE PARTS KITS
KDF has developed recommended spare part kits:
These kits enable your maintenance department to minimize downtime for preventive maintenance and enable production to suffer a minimum of downtime due to not having the right part at the right time. These kits are machine generic and can be modified to reflect your individual need, and carry with them a significant discount if purchased as a kit versus individual parts.
Kits for KDF/MRC 600 and 900 as well as kits for KDF 700 and 800 systems include:
- Spare shield set
- Spare PC Boards
- Spare Chambers parts
- Spare Vacuum parts
- Spare heats parts
- Hardware kits
- Custom Pallets
- Spare Scan parts
- Comprehensive Recommended Spares
In addition to the various kits KDF also offers a wide variety (several hundred) of pallets, with materials ranging from Stainless Steel, Aluminum, Copper and Titanium. for use in MRC/KDF systems.
KDF also offers a “swap” generator program which will enable you to continue running while your generator is out for repair. We can ship you a replacement generator same day as requested for you to use until yours is repaired.
In line with your process
KDF carries a full line of parts for your KDF or MRC system. All our parts are manufactured from the original MRC documentation located and maintained at KDF.
With our large inventory we are able to deliver the exact and correctly engineered replacement parts for all MRC and KDF equipment typically within days of your order. We maintain working stock room with thousands of parts valued over 2 million dollars.
KDF and its engineering department are always investigating ways to update and improve older designs for better system reliability, as well as finding replacement parts for obsolete components. Do not be fooled by third party pirated parts, stay with KDF and get the correct part the first time.
KDF supplies replacement parts, retrofit kits, backing plates, target materials and bonding services for MRC and KDF sputtering and etch systems.
KDF - the “original” OEM
There are three major categories for parts:
- Consumables
- Replacement parts
- Electrical assemblies
KDF has parts available for these models:
- 822, 8620, 8667, 8671, 8800
- BMC-600
- Aries
- KDF 600 Series
- KDF 700 Series
- KDF 800 Series
- KDF 900 Series
Consumables:
Shields, o-rings, bearings, heat lamps, magnets (for all cathode types), ion tubes, and TC’s, KDF proprietary lubricant and drive chains.
Replacement Parts:
Inset Cathode™, Upsilon, Mu, Chi and Focest Cathode™. Also Planar, Mark II™, Magterial™, QSet cathodes*. All bellows, gearlock seals, feed throughs (ferro fluidic), pallet carriers, shutter carriers and plates. RF networks, solenoids, relays, cryo pumps, compressors, grippers, gate valves, hydraulic pumps, manifold valves and cylinders, air packages, etch hoist and etch platform assemblies, stainless steel roughing lines view ports, Pyrex collars.
* All cathodes are the sole property of KDF. KDF owns all rights and intellectual property associated with these cathodes
Electrical Assemblies:
Printed circuit boards, RF generators, flow control valves, gas flow controllers, power supplies, (RF and DC), computer boards and I/O cards, analog racks and pressure gauges.
KDF In-Line Spare Parts Kits
KDF has developed recommended spare part kits. These kits enable your maintenance department to minimize downtime for preventive maintenance and enable production to suffer minimum of downtime due to not having the right part at the right time. These kits are machine generic and can be modified to reflect your individual needs, and carry with them significant discount if purchased as a kit versus individual parts.
Kits for KDF/MRC 600 and 900 as well as for KDF 700 and 800 systems include:
- Spare shield set
- Spare PC boards.
- Spare O-ring kit
- Spare chambers parts
- Spare vacuum parts
- Spare heats parts
- Hardware kits
- Spare scan parts
- Comprehensive recommended spares
KDF also offers a variety of conversion kits allowing you to convert your Inset™ cathode from existing configuration (Chi, Mu, Upsilon) to any other configuration (Chi, Mu, Upsilon) that will suit your needs.
In addition to the various kits KDF also offers a wide variety (several hundred) of pallets, with materials ranging from Stainless Steel, Aluminum, Copper, and Titanium, for use in KDF/MRC systems. KDF engineering department is available to help your company with its special pallet requirements as well. These custom pallets are designed to accommodate any / all substrate sizes and shapes.
KDF also offers a “swap” generator program which will enable you to continue running while your generator is out for repair. We can ship you a replacement generator same day as requested for you to use until yours is repaired. Repairs typically take one week.
KDF maintains thousands of parts valued at over 4 million dollars in active stock. Most orders ship the same day
