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New High Rate DC Reactive Processes for Dielectric Films
KDF RELEASE 2002 High rate processes for deposition of dielectric films have been developed using DC reactive sputtering on scanning batch tools. A typical high rate process for the deposition […]
Highly Uniform Dielectric Films Using A Combined Linear Scanning, Velocity Profiling and Planetary Rotating Motion
KDF RELEASE 2002 Exceptionally high uniformities and tight repeatabilities have been achieved for dielectric films on KDF 900 series sputtering tools using a proprietary ERPP™ (enhanced rotating planetary pallet) in […]
KDF Sputtering System Selected By Plasmion and Leading Korean Manufacturer Hanwha L & C for Advanced Oled Production
KDF RELEASE 2002 KDF today announced that Plasmion Corporation has ordered a custom engineered KDF 744NT batch sputtering system for installation at Hanwha L&C’s Korean facility. The KDF 744NT was […]
Raytheon Orders 943NT In-Line Sputtering System From KDF
KDF RELEASE 2002 KDF today announced that the Electronic Systems business of Raytheon Company (NYSE: RTN) has ordered a 943NT in-line sputtering tool for use in its El Segundo, California […]
KDF Installs Multiple In-Line Sputtering Systems in Taiwan
KDF RELEASE 2002 KDF today announced that it has successfully completed installation of multiple in-line sputtering systems at two Taiwanese foundries. Micro Electro Magnetical Technologies Corporation (MEMT), based in Chunan, […]
Batch Processing Not Ready To Retire
ORIGINAL ARTICLE DATE: APRIL 22, 2002 By Kurt Flechsig Electronic News – A decade ago, the development of cluster tools in the IC manufacturing industry seemed to herald the end […]
Alcatel Space Installs 943NT In-Line Sputtering System From KDF
KDF RELEASE 2002 Sale facilitated by European representative TFEsrl KDF today announced that Alcatel Space, a world leader in space telecommunication, will install its 943NT in-line sputtering system this month. […]
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