KDF Sensors and Monitoring - In Line Sputter Coating
ABOUT
A sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends the information to other electronics. Many of todays sensors are fabricated with sputtered thin films..
KDF Technologies thin film deposition technology plays a crucial role in the production of various sensors and related products. Some of our customers applications where thin film coatings are used in the medical industry include:
Switches:
Reed Switch: The reed switch is an electromechanical switch commonly used in proximity sensors. It operates based on an applied magnetic field. The switching mechanism consists of two ferromagnetic blades, separated by only a few microns. When a magnet approaches these blades, they pull toward each other, closing the normally open (NO) contacts and allowing electricity to flow. Some reed switches also have a non-ferromagnetic contact for a normally closed (NC) output. KDF Technologies has been a significant player in supplying thin film sputtering systems to the Reed Switch market.
Sensors:
Integrated Waveguide Sensors via Sol-Gel Thin Films: These sensors combine optical and chemical sensing, offering advantages like portability, reduced costs, and in-situ measurements.
Sol-gel chemistry and top-down processing of sol-gel thin film layers are used to design waveguide-based optical sensors.
Porous sol-gel materials enhance sensitivity and selectivity, both as claddings and as waveguides with improved light-analyte interaction.
Refractive Index Sensors and Spectroscopic Sensors:
On-chip optical chemical sensors rely on evanescent field-analyte interaction.
In waveguide-based devices, guided light interacts with the surrounding environment through the evanescent field.
Interaction can result in phase change or intensity change of the incident light.
These sensors are used for refractive index measurements and spectroscopic analysis (including IR absorption and Raman spectroscopy).
Polymers Thin Film Sensors:
Polyaniline (PANI) thin films are used in chemical sensors due to their high surface area and fast response time.
PANI thin films can be precisely applied onto substrates, making them suitable for sensing stages in chemical sensors.
High-Temperature Strain Sensors:
Thin film gauges based on materials like PdCr operate at elevated temperatures (up to 1100°C).
These sensors outperform commercially available technologies, surviving fatigue tests and cyclic strain up to 700Hz at high temperatures.
KDF Magnetron Sputtering
Magnetron sputtering is well suited to providing these films. Sputtering systems from KDF Technologies are in use at leading medical device companies depositing films such Au, TiW, Ir, Ag, Zr, Ta, TaN, Ti, and TiN. With established technologies such as HIPIMS and Pulsed DC reactive sputtering we are in an ideal position to personalize a tool for your unique medical device application, backed by our team of dedicated applications, design and vacuum experts.
Key Capabilities
3-Dimensional and Large Parts
Parts up to 4” in thickness can be loaded into tall horizontal (900 series) systems.
Pallets can hold total loaded weights of up to 150 pounds (system specific).
Pallet Stacker (900 series only):
Increases the load lock cassette capacity to 5 pallets. This allows a longer run time between load and un-load cycles, ideal for un-supervised operation.
Note each pallet can run the same deposition recipe or its own unique deposition recipe.
Precious Metal Sputtering with Upsilon Inset™ Cathode
Specifically designed for high thermal conductivity, high value materials such as Gold (Au), Platinum (Pt), Palladium (Pd), Silver (Ag)
Utilizes novel ‘Upsilon’ shape targets that enables up to 60% target utilization
Water Pump:
Water pumps are high-performance pumps used in conjunction with the high vacuum pump (turbo or cryo) that increase water vapor pumping speeds to substantially improve system throughput and process stability.
HIPIMS:
HIPIMS (High Power Impulse Magnetron Sputtering) is a sputtering power supply and technique that can produce highly dense, smooth, and hard films with enhanced conformality or step-coverage for high aspect ratio applications.
Auto Rate Adjust (ARA):
Auto-rate-adjust will automatically adjust the scan speed or deposition power to account for a decrease in deposition rate from target wear, thereby maintaining a stable process thru the life of the target.
Water Cooling:
If heat during your process is a concern the chamber, internal shielding, and cathodes can all be water cooled.
Scan Velocity Control:
Allows the operator to create velocity profiles for the pallet as it passes through the deposition zone, enhancing film uniformities and rates.
IR Pallet Temperature Measurement:
Integrated pyrometer pallet/part temperature measurement. Instant feedback on temperature of your pallet and/or parts. Temperature readings can be integrated into recipes allowing for continued cooling, or heating, before proceeding with further recipe steps.
Have questions? Contact KDF about our in line sputtering tools
In line with your process
The most reliable in-line sputtering tools in the industry are developed and manufactured by KDF. All of KDF’s systems are engineered to meet versatility and high throughput demands across a number of markets at the industry’s lowest cost of ownership.
- Mainstream silicon
- Emerging materials
- Flat panel displays
- Optical communications
- Medical devices
Across all platforms, KDF’s in-line batch sputtering systems are easier to use and maintain than cluster tools. KDF’s solutions provide users with increased:
- Film uniformity
- Throughput run to run
- Process stability
- ROI
- Automation
- Tool uptime
- Reliability
- Environmental health and safety benefits
KDF meets the needs of its customers by quickly developing tailored solutions and building on its core competencies. KDF can specifically engineerits tools for increased throughput, ROI or time to market. All existing KDF equipment is supported with upgrades and retrofits. In addition, as theOEM for MRC batch systems, KDF sustains all MRC batch products offering complete parts and service support on a world wide basis.
943ix and 954ix
The 943ix and 954ix are two of KDF’s x Series™ products. They feature the latest KDF cathode designs, which have been lengthened to 17 inches, offering improved uniformity over the entire pallet. x Series™ cathodes are available in both Planar™, Inset™ and RF/DC LMM™ cathode form.
