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Kdf electronics inline sputtering equipment
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      PVD and Sputtering
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Sputtering Products Overview

Sputter Products

SPUTTER PRODUCTS

KDF is committed to delivering quality products

We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets. The complete line of KDF equipment has been redesigned and improved to meet today’s critical applications.

Please select one of our Sputter Products below:

900i/ix Series

903i, 943i, 943ix, 954i, 954ix
12 x 12 inch pallet area
3 or 4 target systems
974i
Gen 2.5 capable
20 x 20 inch pallet area
4 target system
DC Magnetron sputtering
RF sputtering
Pulsed DC sputtering
Reactive sputtering
HIPIMS sputtering
Down Sputter
Sub 1% uniformity with
Planetary pallet option
Read MORE
900series
Kdf electronic  vacuum services inc

974 Series

12 x 12 inch pallet area
3 or 4 target systems
974i
Gen 2.5 capable
20 x 20 inch pallet area
4 target system
DC Magnetron sputtering
RF sputtering
Pulsed DC sputtering
Reactive sputtering
HIPIMS sputtering
Down Sputter
Sub 1% uniformity with
Planetary pallet option
Read MORE

744i Series

Gen 2 capable
19 x 19 inch pallet area
4 target system
Production system
DC Magnetron sputtering
RF sputtering
Pulsed DC sputtering
Reactive sputtering
HIPIMS sputtering
Side Sputter Advantage
– Low Particulate System
– High Quality PVD Thin Films
Read MORE
700series

844i Series

Gen 3.5 capable
26.5 x 30 inch pallet area
4 target system
High production system
DC Magnetron sputtering
RF sputtering
Pulsed DC sputtering
Reactive sputtering
HIPIMS sputtering
Side Sputter Advantage
– Low Particulate System
– High Quality PVD Thin Films
Read MORE
800series
600series

600i/ix Series

603i, 643i, 643ix, 654i, 654ix
13 x 13 inch pallet area
3 or 4 target systems
RF sputtering
Pulsed DC sputtering
Reactive sputtering
HIPIMS sputtering
Side Sputter Advantage
– Low Particulate System
– High Quality PVD Thin Films
Read MORE

Opus Robotic C2C Loading System

This cassette to cassette option allows full automated wafer loading into our 600, 700 and 800 tools

Read MORE
Opus

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We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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Customer Service & Support

(201) 784-1400

Contact Us

(201) 784-5005
(201) 784-0202
sales@kdf.com
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