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sputtering system​

Sipat Orders Another KDF 900 Series In-Line Sputtering Tool for High Throughput Surface Acoustic Wave Manufacturing

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KDF RELEASE 2004

KDF today announced that the company has received an order for a KDF 954NT in-line sputtering system from the Sichuan Institute of Piezoelectric & Acousto-optic Technology (SIPAT), a leading research and development facility in China. The system will be used in the production of surface acoustic wave (SAW) devices, which are commonly used in the growing wireless and mobile communications market.

SIPAT is a repeat customer and has been using a KDF 943 Series tool for several years. The institute chose the 954NT based on the system’s throughput, versatility, reliability and established history as a production-worthy tool. SIPAT was particularly interested in the 954NT’s uniform, stable deposition of thin films and ability to deposit on various substrate sizes.

“It is always gratifying when a customer returns to buy a second tool from KDF,” said Kurt Flechsig, KDF president. “In doing so, the Sichuan Institute of Piezoelectric & Acousto-optic Technology has demonstrated satisfaction with our technology, service and support. It is also important to note that SIPAT’s purchase represents recognition of the value that the KDF 954NT brings to the production of SAWs and other compound semiconductors. ”

SAW devices are used to control and process electrical signals. Increasingly, SAWs are making their way into in mass market consumer electronics. The proliferation of wireless products and new technologies coming online for wireless data have lead to a dramatic spike in the demand for SAWs. The worldwide market for SAW devices is already worth more than $1 billion, and is projected to continue growing.

The 954NT is a four-target batch sputtering tool for front- and backside deposition. The tool, which is optimized for processing GaAs and other compound semiconductor applications, features a low cost of ownership, and enables high utilization and throughput. Like all KDF 900 Series tools, the 954NT offers users the capability of a production tool with the process flexibility typically found in an R&D system. The 900 Series exceeds requirements for deposition of thin films in application critical devices and other applications requiring the absolute in uniformity.

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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
About Sipat
Sichuan Institute of Piezoelectric and Acousto-optic Technology(SIPAT), is the key Chinese institute specializing in research on piezoelectric and acousto-optic technology. Founded in 1970, SIPAT currently has about 900 employees, including about 100 senior researches and nearly 200 are engineers. SIPAT’s research is focused on SAW technology, piezoelectric and acousto-optic crystal materials, BAW microwave delay line, DWDM and piezoelectric or ferroelectric ceramic materials and devices. Since its founding, SIPAT has recorded nearly 400 strong technical achievements.
Company Contacts
Kurt Flechsig
President & CEO
Tel: +1 (201) 784-5005
E-mail: kurt@kdf.com

KDF Sputtering System Selected By Plasmion and Leading Korean Manufacturer Hanwha L & C for Advanced Oled Production

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KDF RELEASE 2002

KDF today announced that Plasmion Corporation has ordered a custom engineered KDF 744NT batch sputtering system for installation at Hanwha L&C’s Korean facility. The KDF 744NT was ordered as the result of a strategic alliance between Plasmion and Hanwha L&C wherein, Hanwha licensed Plasmion’s Negative Sputter Ion Beam (NSIB) technology and ordered a production system from Plasmion. After critical review, Plasmion and Hanwha selected KDF’s 744NT tool retrofitted with Plasmion’s Negative Sputter Ion Beam. By developing a tailored solution quickly, KDF demonstrated its ability to meet the needs of partners and customers based on its core competencies. The production system is scheduled for installation at Hanwha L&C in December 2002.

Hanwha will use the enhanced 744NT system to manufacture and process ITO coated glass for use in the production of Organic Light Emitting Displays (OLED). OLED is a new type of flat panel display that is currently used in automotive audio and cellular telephone applications. Hanwha plastics manufactured with the new production system will be able to replace the glass used to manufacture OLEDs, providing the display industry with a more cost-efficient way of manufacturing displays for miniature and mobile applications.

“We selected the KDF 700 Series production platform because this batch sputtering system can be easily upgraded to utilize our ITO coating process,” commented James A. Ionson, CEO, Plasmion Corporation. Mr. Ionson further disclosed that “Our strategic alliance with Hanwha is the first of many production partnerships we plan to form with end-users of our process technology, and we will be actively working with major equipment manufacturers such as KDF to embed our cost-effective process within their systems.”

“This is a reliable and advanced solution that will meet our requirements for ITO coated glass production,” said Jin Ki Paik, vice president, business development, Hanwha. “Uniting Plasmion’s Negative Sputter Ion Beam technology with KDF’s production-proven sputter system provides us with the best of both worlds.”

“This design win demonstrates how flexible and customer-focused we are. In this instance our systems will be customized to meet the customer’s specific needs and cover a wide variety of process requirements. Partnering with a leading-edge technology provider such as Plasmion Corporation gave us the opportunity to participate in this design win for Hanwha, the top petrochemical company in Korea,” said Kurt Flechsig, president of KDF.

The KDF 744NT is a large area, four-target, batch sputtering system, designed for processing high-density interconnect, 200mm semiconductor wafers and flat panel displays. The Plasmion enhancement of the KDF 744NT includes an NSIB that provides excellent ITO coatings on polycarbonate substrates at very low temperatures. Plasmion’s technology creates solid ion beams during the coating process to achieve an atomically smooth surface.

The 744NT is equipped with a high-vacuum loadlock configured with a substrate pre-heat that enables the tool’s high throughput. The 744NT offers a pallet area of 19 x 19 inches with a compact footprint that uses less than one-third the floorspace of competing equipment. The tool can hold four 200mm wafers or multiple smaller wafers and features two processing pallets, allowing an instantaneous change of wafer sizes and the ability to process both the front and back sides of wafers.

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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
About Hanwha L & C
Hanwha Group is a multi-billion dollar company involved in information services, construction, explosives, machinery, trade and telecommunications. Established in 1966, Hanwha L&C Corp., a unit of the Chemical and Explosive Division of Hanwha Group, currently is involved in plastics, chemical products, automotive parts and floor-covering materials with manufacturing plants in Jinhae and Bookang, Korea.
About Plasmion
Plasmion Corporation is a market-driven technology company focused on delivering leading edge thin film application technology for the display, semiconductor, storage disk and optical communications industries and novel atmospheric pressure plasma technology for use in manufacturing plasma displays, etching/cleaning of electronic structures, surface modification and medical sterilization. Plasmion was formed in 2001 through the merger of two companies founded by scientists and inventors from Stevens Institute of Technology. Plasmion Corporation is headquartered in Hoboken, NJ, with representatives worldwide, including Europe, Japan, Korea and Taiwan.
Company Contacts
Kurt Flechsig
President & CEO
Tel: +1 (201) 784-5005
E-mail: kurt@kdf.com

We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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