The Linear Moving Magnet sputter cathode – LMM™ cathode, is a patented full face erosion rectangular design and it is available for all KDF systems. We continue to innovate this field proven LMM™ cathode design so that our clients now have the full capability to run RF depositions and full dielectrics can be deposited.
The LMM™ cathode offers high material utilization with minimized re-deposition resulting in reduced particulates. The LMM™ cathode enhanced design advances the capability to work in DC pulse reactive sputter mode with all materials. A Magterial™ version of the LMM™ cathode is available providing the ultimate in utilization and lifetime when sputtering magnetic materials such as Nickel.
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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
