KDF introduces the newly enhanced Planetary Pallet design.
This enhanced Planetary Pallet design is an internally motor-driven pallet which can hold wafers sizes from 2 to 5 inches in a rotational “sun” and “planetary” motion while the pallet linearly traverses under the deposition cathode. These three motions allow for deposition uniformity that is ranging from better than 2% to better than 1%.
Our clients have reported better than 1% uniformity with this enhanced Planetary Pallet in production.
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