KDF Enhanced Planetary Pallet for 900i Series Batch Sputtering Systems

KDF introduces the newly enhanced Planetary Pallet design.

This enhanced Planetary Pallet design is an internally motor-driven pallet which can hold wafers sizes from 2 to 5 inches in a rotational “sun” and “planetary” motion while the pallet linearly traverses under the deposition cathode. These three motions allow for deposition uniformity that is ranging from better than 2% to better than 1%.

Our clients have reported better than 1% uniformity with this enhanced Planetary Pallet in production.

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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
Company Contacts
Kurt Flechsig
President & CEO
Tel: +1 (201) 784-5005
E-mail: kurt@kdf.com
KDF Enhanced Planetary Pallet for 900i Series Batch Sputtering Systems