Original Batch
OEM Parts
KDF is the authoritative OEM source for parts and components covering the full KDF and MRC batch sputtering system installed base. When you need the right part — not a substitute — KDF has it, backed by 35+ years of original documentation, drawings, and manufacturing expertise.
Three Categories. Complete Coverage.
KDF organizes its original batch OEM parts into three major categories — consumables, replacement parts, and electrical — covering every component type across the full KDF and MRC system lineup.
Consumables
High-wear components that require regular replacement during normal system operation. Stocking these parts minimizes unplanned downtime and keeps your process running within spec.
- Shields (chamber and loadlock)
- O-rings — all system types
- Bearings
- Heat lamps (quartz heater assemblies)
- Magnets for all cathode types
- Pallets — custom or standard configurations
- Ion tubes
- Thermocouples (TCs)
Replacement Parts
Mechanical and process components covering the full system — from cathodes and pallet carriers to vacuum hardware and motion assemblies. All sourced or manufactured to original KDF and MRC specifications.
- Cathodes — Inset™, Upsilon, Mu, Chi, Focest™, Planar, Mark II™, Magterial™, X-Series™, Q-Set
- Bellows and garlock seals
- Ferro-fluidic feedthroughs
- Pallet carriers and shutter carriages
- Shutter plates
- RF networks
- Solenoids and relays
- Cryo pumps and compressors
- Gate valves
- Hydraulic pumps, manifolds, valves, and cylinders
- Air packages, grippers, and valves
- Etch platforms and etch hoist assemblies
- Stainless steel roughing lines
- Viewports
- ★ Inset™, Upsilon, Mu, Chi, and Focest™ cathodes are patented — sole property of KDF Technologies. KDF owns all rights and intellectual property associated with these cathodes.
Electrical Components
Control, power, and instrumentation electronics — sourced as original replacements to ensure system behavior matches factory specifications. Critical for process repeatability and system safety compliance.
- Printed circuit boards
- RF generators
- Flow control valves
- Gas flow controllers (MFCs)
- RF power supplies
- DC power supplies
- Computer boards and I/O cards
- Analog racks
- Pressure gauges (all types)
Supported Systems
KDF maintains original parts coverage for the following KDF and MRC batch sputtering system families. Call with your system model or original MRC job number and KDF will identify and supply the correct part.
165,000+ Original MRC Drawings on File
KDF maintains a complete drawing and documentation file of over 165,000 original MRC drawings — including unique job-level prints — ensuring the most accurate parts identification and service for your original MRC system. Call with your MRC job number for immediate lookup.
The Case for Genuine KDF Parts
Process Integrity
Original OEM parts are manufactured to the same tolerances and specifications as the original system components — ensuring process behavior, uniformity, and repeatability remain unchanged after a repair or replacement.
Uptime & Reliability
Non-OEM substitutes introduce unknown variables into a precisely engineered system. KDF original parts have known service lives, failure modes, and replacement intervals — giving you predictable maintenance cycles and maximum tool uptime.
Full Documentation
Every KDF and MRC part is backed by original engineering drawings and documentation. KDF's 165,000+ drawing archive means even legacy MRC systems can be serviced with the same accuracy as current KDF equipment.
Expert Support
When you order from KDF, you get more than a part — you get access to KDF's engineering and process staff who can advise on installation, root cause, and preventive maintenance to stop the same failure from recurring.
Worldwide Availability
KDF maintains two US support locations and a network of factory-trained international reps in Europe and Asia — ensuring part availability and technical support wherever your systems are running.
Sole-Source Cathodes
KDF's patented cathodes — Inset™, Upsilon, Mu, Chi, and Focest™ — are sole property of KDF Technologies and cannot be sourced anywhere else. Genuine KDF is the only source for these performance-critical components.
Order OEM Parts Today
Contact KDF's parts team with your system model or MRC job number. Our technical staff will identify the correct part and get you back up and running as quickly as possible.
