KDF Releases and Installs the New 844i Systems


After ten months of engineering KDF has released and installed the new 844i systems. KDF had listen to their customers and realized that the 844 platform had to grow in order to accommodate the new generations of hi-end displays and CCD pickups , hence the larger format 844 was born. The new 844i offers a pallet size of 26.5 by 30 inchs , which also increase throughput for other users which utilize wafers or alumna substrates.

The new system only grew a few inches externally , but KDF was able to give back by repackaging the overall computers and PLC controls, the new Cybertronics all in one computer and keyboard assembly allowed us to utilize a small portable round around computer station and touch screen to run all system functions. All motions in the tool are executed by either stepper driven encoder feedback drives or in the case of the Load Lock elevator a linear encoder for positional readouts. Motion control and speed controls are extremely critical for exacting process , so speed regulation pallet scanning is resoluted at .001%. RF and DC power supplies communicate directly through RS232 type ports to provide all data and information from that power supply, which are done in real time. The use of MKS cluster gauges simplify the wiring and allow greater interlocking of sensitive gauge types . KDF’s extensive in-house expertise of software allows us to integrate all our gained experience of process and machine tool operation into a seamless operating system for the customer.

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About KDF
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.
Company Contacts
Kurt Flechsig
President & CEO
Tel: +1 (201) 784-5005
E-mail: kurt@kdf.com
KDF Releases and Installs the New 844i Systems