Sputter Products

KDF is committed to delivering quality products

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Please select one of our Sputter Products below:

600 Series

654, 603, 643, 654
Side Sputter A
Low Particulate System
High Rate Reactive processes
13 x 13 pallet area
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744i Series

Gen 2 capable
4 Target RF/DC System
Production System
19 x 19 inch pallet area
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844i Series

Gen 3.5 capable
26 ½ x 30 inch pallet area
High production system
Side sputter application
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900 Series

954, 903, 943, 974
12 x 12 to 20 x 20 pallet area
4 target system
RF/DC capable targets
Planetary pallet for uniformity better than one half percent
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Opus C to C

This cassette to cassette option allows full automated wafer loading into our 600, 700 and 800 tools
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KDF Electronics In-line Products 8600 Series

8600i Series

RF + DC Operation
RF Etch and Bias Modes
Specialty Batch PVD Tools
R + D and production tools
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Cluster Ci Tool

Four and Eight Sided Systems
100-200mm wafers
Wafer carrier for odd sizes
Hi Rate moving magnetrons (G12)
Degas RF Etch, RIE, MIE
Along with ion mill
PVD uniformity below 2%
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The all new standalone CiM [ Cluster individual Modules] are a new offering from KDF. These modules can be purchased as Sputter[single or multi cathode] , Etch or degas modules , with single wafer manual load or automated cassette loading. KDF can produce custom modules to meet specific customer requirements All modules have the capability to connect up to a KDF central handler for future expansion.
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