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News

DC Sputtering Cathode Design

Vishal Agrawal · July 23, 2021 ·

Written by Kurt Flechsig

7/23/2021

 

DC Magnetron sputtering is a means to achieve higher rates of sputtering over that of diode operation.

KDF offers various cathode designs ranging from sputtering dielectrics, metals and magnetic materials. We have a cathode design that will fit any of your requirements.

Our cathode designs not only take into consideration the sputter rate, but also the utilization and film uniformity as well.

The KDF family of cathodes are of Linear design and span various sizes, starting from 5 x 15 inch, 5 x 17 inch, 5 x 24.5 inch and finally our largest 5 x 30.5 inch cathode.

All of our designs are lab and field proven with thousands of cathodes sold throughout the world. Today’s magnet packs can be comprised of AlNiCo 5, SmCo and NdFe B depending on the application and design of the cathode.

KDF uses all of these types of magnets to create the most productive ionized plasma for a reliable sputter source . When these cathodes are used in KDF inline sputtering systems you can be assured of the best possible outcome of your sputtering job.

author avatar
Vishal Agrawal
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Blog cathode design, DC sputtering

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About KDF

KDF Technologies, LLC, produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea.

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We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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