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TEST KJLC PAGE

PVD-BATCH DRUM SERIES

The Kurt J. Lesker Company PVD-BATCH DRUM SERIES consists of two standard sizes (PVD 200 AND PVD 500), which can be configured in either a horizontal or vertical configuration. A horizontal configuration is preferred where particulate is a major concern. Both horizontal and vertical configurations are available with dual axis rotation for 3D coatings. Throughput, measured by deposition area per run, can range from a few hundred square inches to over 2000 square inches, and larger custom systems are also available.

Kdf laser diodes photonics and quantum technology

PVD 200 Drum Coater
Horizontal Or Vertical Drum (Horizontal Shown)

PVD 500 Drum Coater
Horizontal Or Vertical Drum (Vertical Shown)

Specifications

Platform

PVD 200 Drum Coater

PVD 500 Drum Coater


Orientation

Horizontal or Vertical

Horizontal or Vertical


Deposition Zone

Up To 300 sq/in Of Deposition Area
(Overall Drum = 9″ OD x 15″ LG)

Up To 1,440 sq/in Of Deposition Area
(Overall Drum = 30.5″ OD x ≈21″ LG)


Substrate Manipulation

Heating, Cooling, Bias, Removable Panels

Single and Dual Axis Rotation For 3D Components

Ion Etch Option

Heating, Cooling, Bias, Removable Panels

Single and Dual Axis Rotation For 3D Components

Ion Etch Option


Source Capacity

Up to (4) Sides Available for Linear Cathodes or a Linear Ion Source

Up to (7) Sides Available for Linear Cathodes or a Linear Ion Source


Power Supplies

DC, PDC, RF, MF and HIPPIMS Power Supplies

DC, PDC, RF, MF and HIPPIMS Power Supplies


Source Accessibility

Easy Access to Sputter Sources Through Drop-down/Hinged Doors

Easy Access to Sputter Sources Through Drop-down/Hinged Doors

 

PVD 200 Drum in a vertical orientation, showing the drop-down/hinged doors and customized cathodes in opposite side.

 

PVD 500 Drum in a vertical orientation, showing a Si 3-piece target during installation.

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We offer the most advanced and reliable physical vapor deposition batch in-line sputtering tools at the industry’s lowest cost of ownership. KDF systems can be customized to meet the customer’s needs and cover a wide variety of process requirements for the mainstream silicon, emerging materials and flat panel display markets.

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