Opus Robot C to C

Next Level in System Integration

KDF now has available for all 600 series, 744 and 844i systems an added level of system automation and cleanliness.

Opus Robot C to C
The KDF robotic load option allows for system fabs to now more fully integrate their processes. The robotic loader utilizes a clean room 6-axis robot. The handler can easily accommodate 100mm thru 300 mm wafer sizes as well as a multitude of unique substrate shapes and sizes. Throughput for 150 mm wafers on a standard 600 series pallet with a 1 micron Al deposition is >35 WPH. For other system and substrate sizes please consult factory for through put numbers.



Precise handling is accommodated thru a unique wafer-positioning algorithm ensuring accurate and repeatable handling. The robot is enclosed in its own class 100 clean mini environment for enhanced particle reduction.

Design

The design can be utilized as a stand-alone or in a thru the wall installation. The design also allows for servicing the load lock area without undocking the robot. The robotic loader comes with a roll around human interface terminal making system maintenance more convenient.

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Have questions? Contact KDF about the Opus Robot C to C.