After years of development and testing, KDF is proud to announce the release of its new cluster tool line, called Ci for Cluster Intelligence.
The Ci tools will be offered in a four sided and eight sided package, both system types will feature Brooks Marathon series vacuum handlers.
Depending on the application system will be populated as dictated by the process. The Ci is designed for a variety of niche market places including compound semiconductor, DWDM components, MEMS, MOEMS, sensors, Nanotechnology and advanced packaging production with substrate sizes up to 200 mm. The KDF tool is a cost effective means of entering or sustaining today’s high yield high throughput requirements.
Years of expertise
With over 35 years of manufacturing and engineering expertise KDF is confident that this tool will out perform others in its class without the high cost of other OEM’s. This tool can be run with custom wafer carriers if required, or can configured from 4 to 8 inch wafers as ordered.