• Techware replacement kit for T systems

  Replaces obsolete Techware computer along with DC and RF power supplies, scan motor, vacuum and pressure measuring devices, along with complete cable kit.




• Techware replacement kit for GT systems

  Replaces obsolete Techware computer along with support components




• Techware replacement kit for NT systems

  Replaces obsolete Techware computer and NT PC along with support components

Linear Transducer

• Load lock linear transducer replacement kit

  Replaces mechanical switches and hydraulic cylinder with an integrated linear transducer increases the accuracy of the L/L exchange positions as well as creating a more limited fail safe for a lost position.

• MKS 146 gauge replacement kit

  Replaces obsolete 146 gauges with MKS Smart 999 and 925 along with a VAT throttling gate valve for more precise position and pressure controlling.

To request literature or a quote for PLC upgrades, please click below.

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