Utilizing the original drawings and an original work force KDF offers 3 distinct levels of system remanufacture: Level 1 involves rebuilding an existing MRC tool to original factory specifications. This includes factory refurbishing major OEM components. The MRC tool goes through a 500 point quality check list and acceptance test procedure (ATP) insuring that the system runs as well as the day it left the factory.

Level 2 offers the same service and quality as level 1 plus it offers the customer choice of replacement of MRC high failure items with KDF designed enhanced and improved retrofit packages. These upgrades greatly improve system reliability and up time. Level 3 offers a complete KDF re-manufactured to a i system.

Regardless of Level of remanufactured type, all come with KDF’s ongoing process and service support.KDF offers warranties and installations for the pre-owned systems along with process support. KDF tools arrive at your site ready to run your process needs.

     MRC 943

• Down sputter system
• Fully automated controlled system
• Recipe storage
• Hi Vac & Heat Load Lock with CTI pump
• CTI Cryo pumped main chamber
• 10 KW DC supply
• MRC 1.5 KW RF power supply
• RF etch
• Three RF/DC Planer cathodes
• Consult factory for price and other options

     MRC 903M

• Down sputter system
• Semi Automatic manual system
• CTI Cryo pumped main chamber
• MRC 10 KW DC power supply
• MRC 1.5 KW RF supply
• RF etch
• Auto Pump down
• Three RF/DC Planer cathodes
• Consult factory for price and other options

     MRC 603II

• Side sputter system
• Fully automatic controlled system
• CTI Cryo pumped system
• Recipe storage
• 10 KW DC power supply
• MRC RF 1.5 KW RF supply
• RF etch
• Three RF/DC Planer cathodes
• Consult factory for price and other options

     MRC 603III

       A fully automated batch production system
       designed for:

• Fine line and high density circuit patterns
• Interconnect materials
• Interlayer dielectric materials
• Consult factory for price and other options
  

                                          KDF does not support third party rebuilt MRC systems