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Original
OEM Parts |
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There
are three major categories for parts: |
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KDF
has parts available for these models: |
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8667, 8671,
822 |
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900 Series |
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600 Series |
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BMC™ - 600 |
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Aries |
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KDF 700's |
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KDF 800's |
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Consumables |
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Shields, o-rings, bearings, heat
lamps, magnets (for all cathode types), pallets
(custom or standard), ion tubes and TC's. |
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Replacement Parts |
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Cathodes INSET™ - Upsilon, Mu, Chi,
and Focest cathodes*. Also Planar, Mark II, Magterial™,
"X-series"™, & Q-Set. Bellows, garlock seals, feed throughs (ferro
fluidic), pallet carriers, shutter carriages and
plates, RF networks, solenoids, relays, cryo pumps,
compressors grippers, gate valves, hydraulic - pumps,
manifolds, valves and cylinders, air packages, grippers,
valves, etch platforms, etch hoist assemblies, stainless
steel roughing lines and view ports. |
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* These
patented cathodes are sole property of KDF. KDF
owns all rights and intellectual property associated
with these cathodes. |
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Electrical |
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Printed circuit boards, RF generators,
flow control valves, gas flow controllers, power
supplies (RF and DC), computer boards and I/O cards,
analog racks and pressure gauges. |
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